Official name: Danmarks Tekniske Universitet — DTU
National registration number: 30060946
Postal address: Anker Engelunds Vej 1
Town: Kgs. Lyngby
NUTS code: DK012 Københavns omegn
Postal code: 2800
Country: Denmark
Contact person: Mikkel Bjerregaard Jensen
E-mail: mbjje@dtu.dk
Telephone: +45 45252525
Internet address(es):
Main address: http://www.dtu.dk

Body governed by public law

Education

Procurement of Helios Hydra PFIB Gen V

38511100 Scanning electron microscopes

Supplies

DTU Nanolab will procure a Small Dual Beam (SDB) for sample analysis and preparation of samples in the range 5 nm thickness to >1 mm³. The tool will be able to carry out fully automated Electron and Ion Beam alignments, TEM Lamella preparation including pick and place onto TEM grids, automated 3D slice and view, capable of scripting using Python and able to be controlled for machine learning. Electron optics must achieve 0.6 nm nominal resolution 2-15 keV with a monochromated energy spread >200meV. Liquid metal (Ga) Ion source is not acceptable for this application. The FIB should be multi species focused gas plasma. In-column Energy filtering detectors are necessary for the successful imaging of the wide array of sample types analyzed/prepared at DTU Nanolab Remote operation is essential for everyday users and Service.

This contract is divided into lots: no

Value excluding VAT: 12 000 000.00 DKK

38511100 Scanning electron microscopes

NUTS code: DK012 Københavns omegn

The Helios 5 Hydra PFIB DualBeam introduces the only PFIB-SEM microscope with Xe PFIB.

The SEM with Flash image optimization feature adjusts focus, stigmation and lens align in 20 sec. to ease obtaining high resolution images.

The Helios Hydra PFIB is ideal choice for Ga-free sample preparation and 3D characterization techniques like FIB tomography or elemental characterization. It switches between xenon, argon, oxygen or nitrogen. The fully integrated manipulator for in-situ lift-out of lamellae for S/TEM, the EasyLift EX, is capable of rotation which uniquely makes it easy to thin samples from the back side as mounting in 90 or 180 degree orientations is possible.

Electron Optics

Schottky FEG provides an electron beam with incident energy ranging from 20 eV — 30 000 eV and current range of 0.6 pA to 100 nA.

Monochromated electron beam energy spread <200 meV across all accelerating voltages up 100 pA of beam current across incident beam range of 500 eV – 5 keV and landing energies <20 eV.

Immersion lens imaging mode enables imaging over a working distance from 8 mm to 0.5 mm.

The combination of these electron optical elements allows the system to achieve Extreme High Resolution (XHR), specified as:

Electron beam resolution @ optimum WD:

— 0.6 nm at 15 keV

— 0.6 nm at 2 keV

— 0.7 nm at 1 keV

— 1.0 nm at 500 eV

— 1.1 nm at 350 eV

Analytical Resolution

— < 2.0 nm at 15 keV (6.4 nA)

Ion Optics

ICP mulit-source provides a focused ion beam with incident energies ranging from 500 V — 30 kV over a beam current range of 1.5 pA to 2.5 uA. The multi-source allows for fast switching between xenon, argon, oxygen and nitrogen.

The lowest energy ion beam (0.5 kV) to provide a sufficient view of a TEM lamella at the final polishing stage of an in-situ lift-out sample preparation.

A two-stage differentially pumped ion column to ensure the high-fidelity transfer of a pattern under all vacuum conditions.

The combination of these ion-optical elements allows the Helios Hydra PFIB DualBeam to meet or exceed the following performance specifications:

Ion beam resolution

• 20 nm at 30 kV (preferred statistical method)

• 10 nm @ 30 kV (selective edge method)

Signal Detectors

Optical Navigation Camera- full view of sample holder over the full range of travel of the XY stage.

Low Voltage, high contrast Directional Back Scatter detector.

Single Crystal retractable STEM detector with annular BF and DF regions and a segmented annular HAADF region.

Secondary electron (SE) and secondary ion (SI) detector (ICE™).

In-Column Detector (ICD)

Fully integrated plasma cleaner for sample and chamber cleaning.

Automation

AutoTEM 5 sample preparation software designed for unattended sample preparation of S/TEM specimens. Furthermore, the automation platform offers guided assist to novice users in the use of the EasyLift manipulator for extracting samples and placing them onto TEM grids.

AutoTEM 5 Automation Science is an extension for AutoTEM 5 Fully automated in-situ lift-out step for Inverted, Top Down and Planar use cases. This enables the following workflows:

— top down: unattended, fully automated, multi-site sample preparation, covering all steps — chunking, lift-out and final thinning

— planar/inverted: unattended, fully automated, multi-site chunking and lift-out (maximum 3 sites per run). Final thinning is semi-automated for Planar and manual for Inverted use case.

Auto Slice and View 4 automated FIB tomography package. Serially acquire signals from the system or 3rd party detectors automated/unattended. Simultaneous signal acquisition, multiple fields of view. Pause project and make changes on the fly without stopping the project.

AutoScript 4 Application Programming Interface (API) based on the high-level programming lan-guage Python.

Price

Options: no

The procurement is related to a project and/or programme financed by European Union funds: no

Negotiated procedure without prior publication

Explanation:

The Helios Hydra PFIB is the only available Dual Beam system on the market that provides a multi-species gas PFIB with full range of operation from 500 V to 30 kV. Combining the PFIB and extreme resolution XHR UC Plus Elstar SEM column in one package and with the use of the fully integrated Auto TEM 5 and the Auto Science software features, automated throughput and quality of end product samples is unparalleled. With the fully integrated automated processes and align-ments the Helios Hydra PFIB is equipped with, it offers the only Dual Beam to achieve extreme resolution from the very best of SEM, TEM, ATP, EBSD/TKD and EDS analysis (amongst others) yet with the robustness to afford training of, and usage toa user base with a broad range of competences.

DTU Nanolab’s focus on 3D characterization, high quality cross-section preparation for HR-EBSD/TKD and lamella sample preparation for S/TEM specimens for materials science research will push the imaging and analysis capabilities of the instrument to the very limit. With the performance of the Helios Hydra PFIB and the configuration proposed by Thermo Fisher Scientific, purchasing this system and partnering with Thermo Fisher Scientific affords DTU Nanolab the greatest value in terms of state-of-the-art instrument capability, ease-of-use, and proven service and support as evidenced by the large installed base of Dual Beam instruments world-wide and existing the tools at DTU Nanolab.

After extensive research and evaluation of all commercially available systems, we have determined that the Helios Hydra PFIB from Thermo Fisher Scientific provides the only combination of system performance and support that can meet the demanding needs of DTU Nanolab and its user base. The unique Thermo Fisher Scientific’s UniColore (UC Plus) technolo-gy as well as Thermo Fisher Scientific’s leadership in FIB of more than 25 years of FIB-SEM integration, extensive applica-tions experience in FIB and DualBeam technology set the standard in the PFIB-SEM market today that meet the technical specifation needs of DTU Nanolab.

The procurement is covered by the Government Procurement Agreement: yes

27/11/2020

The contract has been awarded to a group of economic operators: no

Official name: FEI Europe BV, branch Denmark
Town: København
NUTS code: DK01 Hovedstaden
Country: Denmark

The contractor/concessionaire will be an SME: yes

Total value of the contract/lot/concession: 12 000 000.00 DKK

Official name: Klagenævnet for Udbud
Postal address: Nævnenes hus, Toldboden 2
Town: Viborg
Postal code: 8800
Country: Denmark
E-mail: klfu@erst.dk
Telephone: +45 35291000
Internet address: http://www.klfu.dk

Precise information on deadline(s) for review procedures:

Deadlines for submission of complaints

Complaint regarding pre-qualification:

Complaint regarding pre-qualification must be submitted no later than 20 calendar days after notification has been sent to the concerned candidates informing them who has been selected, if the notification includes the grounds for the decision, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 1.

Complaint regarding award of contract:

Complaint regarding the award of a contract must be submitted no later than 45 calendar days from the date after the contracting authority has published a notice in the European Union Official Journal informing that the contracting authority has awarded/concluded a contract, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, No 1.

Complaint regarding award of a contract under a framework agreement with a reopening of the competition (mini-tender):

Complaint regarding the award of a contract under a framework agreement with a reopening of the competition must be submitted no later than 30 calendar days from the date after the contracting authority has notified the concerned tenderers that a contract based on a framework agreement with a reopening of the competition has been awarded/concluded, if the notification includes the grounds for the decision, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, No 2.

Complaint regarding the award of a framework agreement:

Complaint regarding the award of a contract must be submitted no later than 6 months from the date after the contracting authority has notified the concerned candidates and tenderers that a framework agreement has been concluded, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, No 3.

Complaint regarding direct award of contract:

Complaint that the contracting authority, contrary to the Public Procurement Act, has concluded a contract without prior publication of a contract notice in the European Union Official Journal must be submitted no later than 30 calendar days from the date after a contract award notice has been published by the contracting authority in the European Union Official Journal and that contract award notice includes the grounds for the decision to award the contract directly, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, section 3.

Compliant regarding public procurements below the EU threshold:

Complaint regarding violation of public procurements below the EU threshold must be submitted no later than 45 calendar days from the date after the contracting authority has notified the tenderers about the award of contract, if this notification includes the grounds for the decision; and no later than 6 months from the date after the contracting authority has notified the concerned candidates and Tenderers that a framework agreement has been concluded, if the notification includes the grounds for the decision, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, section 4, No 1 and 2. Compliant regarding pre-qualification on procurement below the EU threshold must be submitted no later than 20 calendar days from the date after the contracting authority has sent a notification to the concerned candidates who has been selected and this notification includes the grounds for the decision, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders)) § 7, Section 5.

Official name: Konkurrence- og Forbrugerstyrelsen
Postal address: Carl Jacobsens Vej 35
Town: Valby
Postal code: 2500
Country: Denmark
E-mail: kfst@kfst.dk
Telephone: +45 41715000
Internet address: http://www.kfst.dk

27/11/2020