Fakta om udbudet

EU-nr

2015/S 182-329379

Offentliggjort

21.09.2015

Udbudstype

Offentligt udbud

Udbyder

Danmarks Tekniske Universitet — DTU

Vindere

Plasma Thermal ALD System

(20.11.2015)
Picosun Oy
Tietotie 3
02150 Espoo

Plasma Thermal ALD System.

Danmarks Tekniske Universitet — DTU

Contract notice

Supplies

Directive 2004/18/EC

Section I: Contracting authority

I.1) Name, addresses and contact point(s)

Danmarks Tekniske Universitet — DTU
30060946
Anker Engelunds Vej 1
For the attention of: Maria Tødt
2800 Kongens Lyngby
DENMARK
Telephone: +45 45251126
E-mail: marbt@adm.dtu.dk

Internet address(es):

General address of the contracting authority: http://www.dtu.dk

Address of the buyer profile: http://eu.eu-supply.com/ctm/Supplier/CompanyInformation/Index/165863

Electronic access to information: http://eu.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=151202&B=DTU

Electronic submission of tenders and requests to participate: http://eu.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=151202&B=DTU

Further information can be obtained from: The above mentioned contact point(s)

Specifications and additional documents (including documents for competitive dialogue and a dynamic purchasing system) can be obtained from: The above mentioned contact point(s)

Tenders or requests to participate must be sent to: The above mentioned contact point(s)

I.2) Type of the contracting authority

Body governed by public law

I.3) Main activity

Education

I.4) Contract award on behalf of other contracting authorities

The contracting authority is purchasing on behalf of other contracting authorities: no

Section II: Object of the contract

II.1) Description

II.1.1) Title attributed to the contract by the contracting authority:

Plasma Thermal ALD System.

II.1.2) Type of contract and location of works, place of delivery or of performance

Supplies
Purchase
Main site or location of works, place of delivery or of performance: Kgs. Lyngby.

NUTS code DK

II.1.3) Information about a public contract, a framework agreement or a dynamic purchasing system (DPS)

The notice involves a public contract

II.1.4) Information on framework agreement

II.1.5) Short description of the contract or purchase(s)

This tender is concerning a combined plasma/thermal Atomic Layer Deposition system (p/t-ALD) for research applications with focus on high flexibility regarding source materials (metals and dielectrics), substrate materials and sizes. It should be possible to deposit metal oxides, metal nitrides and pure metal thin films in ALD-mode. The plasma source should be located in a remote position with respect to the substrate (substrate located ‘down-stream’). It must be possible to run the precursors concurrently, thereby enabling multilayer stacks of thin films. To secure high thermal uniformity the reactor should be provided with heated chamber walls. Furthermore, the ALD system should be equipped with a transfer load-lock to secure optimal vacuum conditions in the reaction chamber during sample transfer. All components of the system should be easy to access and maintain. Regarding the precursor delivery system focus must be on fast precursor/gas valves, strict thermal control of the precursors from bottle to reaction chamber, fast purge/cycle times securing high-precision in the thin film layer control and smallest possible foot print for the total system (reaction chamber including load-lock). The possibility for stacked substrates to increase throughput will have high priority. The instrument will be placed in a multiuser environment, so it must be very user friendly and robust. It is essential that the tool supplier can guarantee fast and reliable service even without a service contract.

II.1.6) Common procurement vocabulary (CPV)

38000000

II.1.7) Information about Government Procurement Agreement (GPA)

The contract is covered by the Government Procurement Agreement (GPA): yes

II.1.8) Lots

This contract is divided into lots: no

II.1.9) Information about variants

Variants will be accepted: no

II.2) Quantity or scope of the contract

II.2.1) Total quantity or scope:

This tender is concerning a combined plasma/thermal Atomic Layer Deposition system (p/t-ALD) for research applications with focus on high flexibility regarding source materials (metals and dielectrics), substrate materials and sizes. It should be possible to deposit metal oxides, metal nitrides and pure metal thin films in ALD-mode. The plasma source should be located in a remote position with respect to the substrate (substrate located ‘down-stream’). It must be possible to run the precursors concurrently, thereby enabling multilayer stacks of thin films. To secure high thermal uniformity the reactor should be provided with heated chamber walls. Furthermore, the ALD system should be equipped with a transfer load-lock to secure optimal vacuum conditions in the reaction chamber during sample transfer. All components of the system should be easy to access and maintain. Regarding the precursor delivery system focus must be on fast precursor/gas valves, strict thermal control of the precursors from bottle to reaction chamber, fast purge/cycle times securing high-precision in the thin film layer control and smallest possible foot print for the total system (reaction chamber inclunding load-lock). The possibility for stacked substrates to increase throughput will have high priority. The instrument will be placed in a multiuser environment, so it must be very user friendly and robust. It is essential that the tool supplier can guarantee fast and reliable service even without a service contract.
Estimated value excluding VAT:
Range: between 3 000 000 and 3 400 000 DKK

II.2.2) Information about options

Options: yes
Description of these options: — High-quality, low noise, dry pump solution, please specify manufacturer and noise level.
— Ozone generator option.
— 4 years contract for yearly service provided by the manufacturer: Please specify offer including parts and labour.
— The Tenderer must give a price for this option.

II.2.3) Information about renewals

This contract is subject to renewal: no

II.3) Duration of the contract or time limit for completion

Duration in months: 36 (from the award of the contract)

Section III: Legal, economic, financial and technical information

III.1) Conditions relating to the contract

III.1.1) Deposits and guarantees required:

Please see draft contract.

III.1.2) Main financing conditions and payment arrangements and/or reference to the relevant provisions governing them:

Please see draft contract.

III.1.3) Legal form to be taken by the group of economic operators to whom the contract is to be awarded:

Please see draft contract.

III.1.4) Other particular conditions

The performance of the contract is subject to particular conditions: no

III.2) Conditions for participation

III.2.1) Personal situation of economic operators, including requirements relating to enrolment on professional or trade registers

Information and formalities necessary for evaluating if the requirements are met: Please see Template A.

III.2.2) Economic and financial ability

Information and formalities necessary for evaluating if the requirements are met: Please see Template B.

III.2.3) Technical capacity

Information and formalities necessary for evaluating if the requirements are met:
Please see Template C.
Minimum level(s) of standards possibly required:
Minimum 3 references.

III.2.4) Information about reserved contracts

III.3) Conditions specific to services contracts

III.3.1) Information about a particular profession

Execution of the service is reserved to a particular profession: no

III.3.2) Staff responsible for the execution of the service

Legal persons should indicate the names and professional qualifications of the staff responsible for the execution of the service: no

Section IV: Procedure

IV.1) Type of procedure

IV.1.1) Type of procedure

Open

IV.1.2) Limitations on the number of operators who will be invited to tender or to participate

IV.1.3) Reduction of the number of operators during the negotiation or dialogue

IV.2) Award criteria

IV.2.1) Award criteria

The most economically advantageous tender in terms of the criteria stated in the specifications, in the invitation to tender or to negotiate or in the descriptive document

IV.2.2) Information about electronic auction

An electronic auction will be used: no

IV.3) Administrative information

IV.3.1) File reference number attributed by the contracting authority:

15/09358 - Plasma Thermal ALD Sy

IV.3.2) Previous publication(s) concerning the same contract

IV.3.3) Conditions for obtaining specifications and additional documents or descriptive document

Payable documents: no

IV.3.4) Time limit for receipt of tenders or requests to participate

20.10.2015 - 12:00

IV.3.5) Date of dispatch of invitations to tender or to participate to selected candidates

IV.3.6) Language(s) in which tenders or requests to participate may be drawn up

English.

IV.3.7) Minimum time frame during which the tenderer must maintain the tender

Duration in months: 3 (from the date stated for receipt of tender)

IV.3.8) Conditions for opening of tenders

Date: 21.10.2015 - 00:00
Persons authorised to be present at the opening of tenders: no

Section VI: Complementary information

VI.1) Information about recurrence

This is a recurrent procurement: no

VI.2) Information about European Union funds

The contract is related to a project and/or programme financed by European Union funds: no

VI.3) Additional information

VI.4) Procedures for appeal

VI.4.1) Body responsible for appeal procedures

Klagenævnet for Udbud
Dahlerups Pakhus, Langelinie Allé 17
2100 Copenhagen
DENMARK
E-mail: klfu@erst.dk
Telephone: +45 35291095
Internet address: https://erhvervsstyrelsen.dk/klagenaevnet-for-udbud

VI.4.2) Lodging of appeals

Precise information on deadline(s) for lodging appeals: Complaints must be sent to the Complaints Board for Public Procurement within a certain deadline. Complaints regarding a decision on shortlisting in a restricted procedure must be received in the Board within 20 days, after the contracting authority's notification of the outcome of the shortlisting. Other complaints must be received in the Board within 45 days from the day after publication of the Contracting Authority's notice in (TED) about entering into a contract. If the subject for the tender is a framework contract, the deadline is 6 months from the Contracting Authority's notice to the tenderers about the tenderer which the Contracting Authority intends to enter into contract with. Complaints regarding the national regulations for tender procedures (Tilbudsloven) must be received at the Board within 45 days after the Contracting Authority have notified the Tenderers about the tenderer which the Contracting Authority intends to enter into contract with. If the complaint is regarding a framework agreement the deadline is 6 months after the Contracting Authority has notified the Tenderers about the Tenderer which the Contracting Authority intends to enter into contract with.

VI.4.3) Service from which information about the lodging of appeals may be obtained

Danish Competition and Consumer Authority
Carl Jacobsens Vej 35
2500 Valby
DENMARK
E-mail: kfst@kfst.dk
Telephone: +45 41715000
Internet address: http://www.kfst.dk/

VI.5) Date of dispatch of this notice:

14.9.2015