Official name: Danmarks Tekniske Universitet - DTU
National registration number: 30060946
Postal address: Anker Engelunds Vej 1
Town: Kgs. Lyngby
NUTS code: DK01 Hovedstaden
Postal code: 2800
Country: Denmark
Contact person: David Fajnzylber
E-mail: dafaj@dtu.dk
Telephone: +45 93596840
Internet address(es):
Main address: http://www.dtu.dk
Address of the buyer profile: https://eu.eu-supply.com/ctm/Company/CompanyInformation/Index/165863

The procurement documents are available for unrestricted and full direct access, free of charge, at: http://eu.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=335844&B=DTU

Additional information can be obtained from the abovementioned address

Tenders or requests to participate must be submitted electronically via: http://eu.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=335844&B=DTU

Tenders or requests to participate must be submitted to the abovementioned address

Body governed by public law

Education

Scanning Electron Microscope

38511000 Electron microscopes

Supplies

This tender concerns the acquisition of a scanning electron microscope (SEM) for a university facility that provides access to an extensive suite of nanofabrication and characterization tools as one of its core purposes.

Value excluding VAT: 500 000.00 EUR

This contract is divided into lots: no

38000000 Laboratory, optical and precision equipments (excl. glasses)

NUTS code: DK01 Hovedstaden

This tender concerns the acquisition of a scanning electron microscope (SEM) for a university facility that provides access to an extensive suite of nanofabrication and characterisation tools as one of its core purposes.

The SEM will be a much needed upgrade of the current SEM capability in the lab. As such, only a high-end instrument with a field emission source offering high emission at low energy spread will be able to provide the necessary the state-of the art lateral image resolution of 0.8 nm or better at 15 kV acceleration voltage and 0.9 nm or better at 1 kV acceleration voltage (with no beam deceleration/sample bias applied) using the in-column SE detector.

As the SEM will cover the most challenging applications in the lab, the list of requirements that need to be met is very extensive. Firstly, the performance at low acceleration voltages must be particularly good as this mode of operation is crucially important for a vast number of applications. Likewise, to ensure ideal imaging conditions free of hydrocarbon contamination, the chamber must be equipped with a chamber-mounted plasma cleaner and if possible, a fully integrated airlock system to increase sample throughput.

Secondly, the instrument must also host a broad selection of advanced electron detectors in addition to the standard in-chamber and in-column secondary electron (SE) detectors for high vacuum conditions. For instance, to qualify subtle material contrast differences, we need in-column energy selective detection of backscatter electrons (BSE's) emerging from completely non-conducting samples that traditionally requires some kind of capability to efficiently suppress the build-up of charges produced by the imaging process. To qualify the same kind of samples we need the alternative imaging path provided by the chamber-mounted (preferably retractable) BSE detector with annular diode detectors.

Thirdly, to address an increasing number of applications relying on the precise manufacturing of ultra-thin membranes, our characterisation capability will improve dramatically with an annular STEM detector for high-resolution transmission measurements.

Finally, we have a strong need to upgrade our ability to characterize nano-structures defined by electron beam lithography. The world-class performance of our E-Beam writer is simply not matched by our current SEM characterisation capability. The situation is especially challenging for line edge roughness measurements of sub 20 nanometre E-beam resist structures deposited onto 150 mm diameter non-conducting substrates. The SEM must have a solution for this application that does not require any kind of sample coating in order to reduce sample charging but delivers the required image resolution.

Price is not the only award criterion and all criteria are stated only in the procurement documents

Value excluding VAT: 500 000.00 EUR

Duration in months: 48

This contract is subject to renewal: no

Variants will be accepted: no

Options: yes

Description of options:

Option 1: Electrostatic beam blanker, cf. Appendix 1 – Requirement Specification (2.17).

Option 2: Airlock, cf. Appendix 1 – Requirement Specification (2.18).

Option 3: Protection from external noise, cf. Appendix 1 – Requirement Specification (2.19).

Option 4: Correlative microscopy, cf. Appendix 1 – Requirement Specification (2.27).

Option 5: Offline image analysis, cf. Appendix 1 – Requirement Specification (2.28).

Minimum Option: Service contract, cf. Appendix 1 – Requirement Specification (5.3).

The procurement is related to a project and/or programme financed by European Union funds: no

Minimum level(s) of standards possibly required:

For the last 3 audited financial years, as a minimum the Tenderer must on average have had a:

- Yearly net turnover of EUR 950.000.

If the Tenderer cannot comply with the required figures for financial standing, the Tenderer can document their financial standing by sending an on-demand guarantee from a bank or similar with a value of EUR 950.000.

Minimum level(s) of standards possibly required:

As a minimum the Tenderer must provide 5 references for comparable agreements.

Comparable agreements mean agreements with a value of at least EUR 470.000 concerning the acquisition of a high-end scanning electron microscope. The agreement, to which the reference refers, must not be more than 3 years old. The date is calculated from the last signature on the agreement referred to.

Open procedure

The procurement is covered by the Government Procurement Agreement: yes

Date: 31/08/2022

Local time: 12:00

English

Date: 31/08/2022

Local time: 12:00

This is a recurrent procurement: yes

Official name: Klagenævnet for Udbud
Postal address: Nævnenes hus, Toldboden 2
Town: Viborg
Postal code: 8800
Country: Denmark
E-mail: klfu@erst.dk
Telephone: +45 35291000
Internet address: http://www.klfu.dk

Precise information on deadline(s) for review procedures:

Complaint regarding the award of a contract must be submitted no later than 45 calendar days from the date after the Contracting Authority has published a notice in the European Union Official Journal informing that the Contracting Authority has awarded/concluded a contract, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, no. 1.

Official name: Konkurrence- og Forbrugerstyrelsen
Postal address: Carl Jacobsens Vej 35
Town: Valby
Postal code: 2500
Country: Denmark
E-mail: kfst@kfst.dk
Telephone: +45 41715000
Internet address: http://www.kfst.dk

04/07/2022