Fakta om udbudet

EU-nr

2022/S 229-660180

Offentliggjort

28.11.2022

Udbudstype

Udbud med forhandling uden forudgående offentliggørelse

Udbyder

Danmarks Tekniske Universitet - DTU

Vindere

(28.11.2022)
ClassOne Equipment, Inc.
5302 Snapfinger Woods Drive
GA 30035 Decatur

Surface Particle Inspection System

Danmarks Tekniske Universitet - DTU

Voluntary ex ante transparency notice

Supplies

Legal Basis:

Directive 2014/24/EU

Section I: Contracting authority/entity

I.1) Name and addresses

Official name: Danmarks Tekniske Universitet - DTU
National registration number: 30060946
Postal address: Anker Engelunds Vej 1
Town: Kgs. Lyngby
NUTS code: DK01 Hovedstaden
Postal code: 2800
Country: Denmark
Contact person: Christian Torrendrup
E-mail: cvto@dtu.dk
Telephone: +45 23100296
Internet address(es):
Main address: http://www.dtu.dk

I.4) Type of the contracting authority

Body governed by public law

I.5) Main activity

Education

Section II: Object

II.1) Scope of the procurement

II.1.1) Title:

Surface Particle Inspection System

Reference number: 7364

II.1.2) Main CPV code

38970000 Research, testing and scientific technical simulator

II.1.3) Type of contract

Supplies

II.1.4) Short description:

DTU Nanolab intend to acquire a new particle inspection system to replace an existing particle inspection system at DTU Nanolab, KLA Tencor Surfscan 6420. It is imperative that the new particle inspection system can fulfil at least the same specifications as the existing Surfscan 6420, and that the procurement value is within a maximum total budget of DKK 1.500.000,- for the new system. Moreover, the supplier must take care of removing the existing system, and since the particle inspection is critical for DTU Nanolab, we need the new system installed and accepted before removing the old system.

With these constraints, we find that only ClassOne can fulfil this agreement.

II.1.6) Information about lots

This contract is divided into lots: no

II.1.7) Total value of the procurement (excluding VAT)

Value excluding VAT: 1 500 000.00 DKK

II.2) Description

II.2.2) Additional CPV code(s)

38970000 Research, testing and scientific technical simulator

II.2.3) Place of performance

NUTS code: DK01 Hovedstaden

II.2.4) Description of the procurement:

The system to be procured must have the following specification:

• Bare wafer surface defect inspection system

• Substrate sizes: 2” – 8” wafer capable

• Substrate thickness: Semi Standard

• Single cassette platform

• Defect sensitivity: 0.079 µm

• Throughput: 55-60 wafers per hour

• Illumination source: Laser diode, 405 nm wavelength

• Fan filter unit with HEPA filter over measurement chamber

• Safety door

• Auto Sensitivity Compensation

• X-Y coordinate output

• Map overlay

• Haze measurement

• Calibration wafer set with NIST certification

• Control PC: Intel Core i7 6700, 4GB RAM, 1TB HDD

• Operating software: Windows 10

• Operations manual & documentation

• 1 year warranty

II.2.5) Award criteria

II.2.11) Information about options

Options: no

II.2.13) Information about European Union funds

The procurement is related to a project and/or programme financed by European Union funds: no

II.2.14) Additional information

Section IV: Procedure

IV.1) Description

IV.1.1) Type of procedure

Negotiated procedure without prior publication

The works, supplies or services can be provided only by a particular economic operator for the following reason:
- absence of competition for technical reasons

Explanation:

To the best of our knowledge, only ClassOne is capable to install a new tool (Takano WM-7SR) fulfilling all technical requirements, on-site (DTU Nanolab) under the agreement, and to remove the presently installed Surfscan 6420 after a trial period, (3 months) if the site test (SAT) of the Takano system by DTU Nanolab is successful.

It is decisive for DTU Nanolab that this SAT can be completed prior to acceptance of the full agreement and removal of the Surfscan 6420 tool.

Moreover, it is imperative that the budget of the agreement is maximum DKK 1.500.000,-

With these constraints, we find that only ClassOne can fulfil this agreement.

IV.1.3) Information about framework agreement

IV.1.8) Information about the Government Procurement Agreement (GPA)

The procurement is covered by the Government Procurement Agreement: yes

IV.2) Administrative information

Section V: Award of contract/concession

V.2) Award of contract/concession

V.2.1) Date of contract award decision:

16/11/2022

V.2.2) Information about tenders

The contract has been awarded to a group of economic operators: no

V.2.3) Name and address of the contractor/concessionaire

Official name: ClassOne Equipment, Inc.
Postal address: 5302 Snapfinger Woods Drive
Town: Decatur
NUTS code: US United States
Postal code: GA 30035
Country: United States

The contractor/concessionaire will be an SME: yes

V.2.4) Information on value of the contract/lot/concession (excluding VAT)

Total value of the contract/lot/concession: 1 500 000.00 DKK

V.2.5) Information about subcontracting

Section VI: Complementary information

VI.3) Additional information:

VI.4) Procedures for review

VI.4.1) Review body

Official name: Klagenævnet for Udbud
Postal address: Nævnenes hus, Toldboden 2
Town: Viborg
Postal code: 8800
Country: Denmark
E-mail: klfu@erst.dk
Telephone: +45 35291000
Internet address: http://www.klfu.dk

VI.4.3) Review procedure

Precise information on deadline(s) for review procedures:

Complaint that the Contracting Authority, contrary to the Public Procurement Act, has concluded a contract without prior publication of a contract notice in the European Union Official Journal must be submitted no later than 30 calendar days from the date after a contract award notice has been published by the Contracting Authority in the European Union Official Journal and that contract award notice includes the grounds for the decision to award the contract directly, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, section 3.

VI.4.4) Service from which information about the review procedure may be obtained

Official name: Konkurrence- og Forbrugerstyrelsen
Postal address: Carl Jacobsens Vej 35
Town: Valby
Postal code: 2500
Country: Denmark
E-mail: kfst@kfst.dk
Telephone: +45 41715000
Internet address: http://www.kfst.dk

VI.5) Date of dispatch of this notice:

23/11/2022