Silicon deep reactive ion etcher (Si DRIE)

1.1.

Buyer

Official name : Danmarks Tekniske Universitet - DTU

Email : aasst@dtu.dk

Legal type of the buyer : Body governed by public law

Activity of the contracting authority : Education

2.1.

Procedure

Title : Silicon deep reactive ion etcher (Si DRIE)

Description : DTU Nanolab requires a silicon deep reactive ion etcher (Si DRIE) to become its new primary instrument for 150 mm wafer processing. Delivery is expected no later than Q4 2026. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients.

Procedure identifier : 050f32be-c45a-4dcc-b4e1-b455cc993aee

Previous notice : 7dfd976f-30ab-4e2c-b6ff-fe07f48ae61a-01

Internal identifier : 9407

Type of procedure : Open

The procedure is accelerated : no

Main features of the procedure : Open Procedure

2.1.1.

Purpose

Main nature of the contract : Supplies

Additional nature of the contract : Services

Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)

Additional classification ( cpv ): 51430000 Installation services of laboratory equipment

2.1.2.

Place of performance

Postal address : Ørsteds Plads, Bygning 347

Town : Lyngby

Postcode : 2800

Country subdivision (NUTS) : Københavns omegn ( DK012 )

Country : Denmark

2.1.4.

General information

Call for competition is terminated

Additional information : The Tenderer can only participate in the tender, if the Tenderer is not encompassed by the compulsory grounds for exclusion, cf. section 135-136 in the Danish Public Procurement Act and the voluntary grounds for exclusion in section 137(1)(1 and 2). Pursuant to section 134a in the Danish Public Procurement Act, DTU must exclude a Tenderer from participation in the procurement procedure if the Tenderer is established in a country that is included in the EU list of non-cooperative tax jurisdictions and has not acceded to the WTO Government Procurement Agreement or other trade agreements that oblige Denmark to open the market for public contracts to tenderers established in the country in question. Throughout the term of the Agreement, the Supplier must not be covered by the description in Article 5k of COUNCIL REGULATION (EU) 2022/576 of 8 April 2022 amending Regulation (EU) No 833/2014 concerning restrictive measures in view of Russia's actions destabilising the situation in Ukraine (‘Regulation 2022/576’). Upon DTU’s request the Tenderers must document that they are not encompassed by any of the grounds for exclusion stated in the ESPD. If the Tenderer is a consortium, all legal participants in the consortium must document that the consortium is not encompassed by any of the grounds for exclusion. If the Tenderer represents a consortium with several legally authorised persons, the Tenderer must complete and submit Appendix A – Consortium Declaration. If the Tender rely on the capacities of other entities, each supportive enterprise must document that they are not encompassed by any of the grounds for exclusion. If the Tenderer relies on the capacities of other entities, each entity must complete and submit Appendix B – Letter of Support. For Danish Tenderers the documentation requirement can be fulfilled by presenting an Official Certificate (Serviceattest) from the Danish Business Authority (Erhvervsstyrelsen), which must be issued no later than 12 months prior to the date where it is presented to DTU. Non-Danish Tenderers must provide: - An extract from a relevant register or a similar document issued by a competent authority, showing that the Tenderer is not encompassed by any of the grounds for exclusion, cf. (the Public Procurement Act) Udbudsloven § 135, sub-section1 (participation in a criminal organization, corruption, bribery, fraud, terrorist or criminal offences linked to terrorist activities, money laundering or terrorist financing and child labour and other forms of human trafficking) and, - A certificate issued by a competent authority showing that the Tenderer is not encompassed by any of the grounds for exclusion, cf. (the Public Procurement Act) Udbudslovens § 135, subsection 3 (payment of taxes and payment of social security) and § 137, sub-section 1, no. 2 (bankruptcy, insolvency, voluntary arrangement with creditors, analogous situation like bankruptcy under national law, assets being administered by liquidator and business activities are suspended). If requested by DTU, the Tenderers must document – as stated in the ESPD - that they fulfil minimum levels for suitability. As documentation for the winning tenderer's documentation for fulfilling minimum requirement for Technical and Professional Ability DTU reserves the right to contact the reference(s) stated in the ESPD. The Tenderers are requested to provide supporting documentation verifying the information submitted in the ESPD to be included with the Tender.

Legal basis :

Directive 2014/24/EU

5.1.

Lot : LOT-0000

Title : Silicon deep reactive ion etcher (Si DRIE)

Description : DTU Nanolab requires a silicon deep reactive ion etcher (Si DRIE) to become its new primary instrument for 150 mm wafer processing. Delivery is expected no later than Q4 2026. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients.

Internal identifier : 9407

5.1.1.

Purpose

Main nature of the contract : Supplies

Additional nature of the contract : Services

Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)

Additional classification ( cpv ): 51430000 Installation services of laboratory equipment

5.1.2.

Place of performance

Postal address : Ørsteds Plads, Bygning 347

Town : Lyngby

Postcode : 2800

Country subdivision (NUTS) : Københavns omegn ( DK012 )

Country : Denmark

5.1.3.

Estimated duration

Other duration : Unknown

5.1.6.

General information

Procurement Project not financed with EU Funds.

The procurement is covered by the Government Procurement Agreement (GPA) : yes

Additional information : The Tenderer can only participate in the tender, if the Tenderer is not encompassed by the compulsory grounds for exclusion, cf. section 135-136 in the Danish Public Procurement Act and the voluntary grounds for exclusion in section 137(1)(1 and 2). Pursuant to section 134a in the Danish Public Procurement Act, DTU must exclude a Tenderer from participation in the procurement procedure if the Tenderer is established in a country that is included in the EU list of non-cooperative tax jurisdictions and has not acceded to the WTO Government Procurement Agreement or other trade agreements that oblige Denmark to open the market for public contracts to tenderers established in the country in question. Throughout the term of the Agreement, the Supplier must not be covered by the description in Article 5k of COUNCIL REGULATION (EU) 2022/576 of 8 April 2022 amending Regulation (EU) No 833/2014 concerning restrictive measures in view of Russia's actions destabilising the situation in Ukraine (‘Regulation 2022/576’). Upon DTU’s request the Tenderers must document that they are not encompassed by any of the grounds for exclusion stated in the ESPD. If the Tenderer is a consortium, all legal participants in the consortium must document that the consortium is not encompassed by any of the grounds for exclusion. If the Tenderer represents a consortium with several legally authorised persons, the Tenderer must complete and submit Appendix A – Consortium Declaration. If the Tender rely on the capacities of other entities, each supportive enterprise must document that they are not encompassed by any of the grounds for exclusion. If the Tenderer relies on the capacities of other entities, each entity must complete and submit Appendix B – Letter of Support. For Danish Tenderers the documentation requirement can be fulfilled by presenting an Official Certificate (Serviceattest) from the Danish Business Authority (Erhvervsstyrelsen), which must be issued no later than 12 months prior to the date where it is presented to DTU. Non-Danish Tenderers must provide: - An extract from a relevant register or a similar document issued by a competent authority, showing that the Tenderer is not encompassed by any of the grounds for exclusion, cf. (the Public Procurement Act) Udbudsloven § 135, sub-section1 (participation in a criminal organization, corruption, bribery, fraud, terrorist or criminal offences linked to terrorist activities, money laundering or terrorist financing and child labour and other forms of human trafficking) and, - A certificate issued by a competent authority showing that the Tenderer is not encompassed by any of the grounds for exclusion, cf. (the Public Procurement Act) Udbudslovens § 135, subsection 3 (payment of taxes and payment of social security) and § 137, sub-section 1, no. 2 (bankruptcy, insolvency, voluntary arrangement with creditors, analogous situation like bankruptcy under national law, assets being administered by liquidator and business activities are suspended). If requested by DTU, the Tenderers must document – as stated in the ESPD - that they fulfil minimum levels for suitability. As documentation for the winning tenderer's documentation for fulfilling minimum requirement for Technical and Professional Ability DTU reserves the right to contact the reference(s) stated in the ESPD. The Tenderers are requested to provide supporting documentation verifying the information submitted in the ESPD to be included with the Tender.

5.1.10.

Award criteria

Criterion:

Type: Price

Name : Price

Description : The price to be evaluated is the total price for the machine as well as the options, but not voluntary option, specified in Appendix 2 – Prices. DTU uses a linear point scale model to evaluate the tender prices. The linear model implies that the prices offered are converted into points.

Category of award weight criterion: Weight (percentage, exact)

Award criterion number : 20,00

Criterion:

Type: Quality

Name : Functionality and Performance

Description : The sub-criteria “Functionality and performance” is based on the Tenderer’s specifications in Appendix 1 – Requirement Specification.

Category of award weight criterion: Weight (percentage, exact)

Award criterion number : 40,00

Criterion:

Type: Quality

Name : Quality of submitted samples

Description : Evaluation of the sub-criteria “Quality of submitted samples” will be made based on an evaluation of the received samples.

Category of award weight criterion: Weight (percentage, exact)

Award criterion number : 40,00

5.1.15.

Techniques

Framework agreement :

No framework agreement

Information about the dynamic purchasing system :

No dynamic purchase system

Electronic auction : no

5.1.16.

Further information, mediation and review

Mediation organisation : Klagenævnet for Udbud

Review organisation : Klagenævnet for Udbud

Information about review deadlines : Complaint regarding the award of a contract must be submitted no later than 45 calendar days from the date after the Contracting Authority has published a notice in the European Union Official Journal informing that the Contracting Authority has awarded/concluded a contract, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, no. 1.

Organisation providing more information on the review procedures : Konkurrence- og Forbrugerstyrelsen

6.1.

Result lot identifier : LOT-0000

Winner selection status : No winner was chosen and the competition is closed.

The reason why a winner was not chosen : Decision of the buyer, because of a change in needs

6.1.4.

Statistical information :

Summary of the review requests the buyer received

Number of complainants : 0

Received tenders or requests to participate :

Type of received submissions : Tenders

Number of tenders or requests to participate received : 0

8.1.

ORG-0001

Official name : Danmarks Tekniske Universitet - DTU

Registration number : 30060946

Postal address : Anker Engelunds Vej 1

Town : Kgs. Lyngby

Postcode : 2800

Country subdivision (NUTS) : Københavns omegn ( DK012 )

Country : Denmark

Contact point : Anna Storch

Email : aasst@dtu.dk

Telephone : +45 25230071

Internet address : https://www.dtu.dk

Buyer profile : https://eu.eu-supply.com/ctm/company/companyinformation/index/165863

Roles of this organisation :

Buyer

8.1.

ORG-0002

Official name : Klagenævnet for Udbud

Registration number : 37795526

Postal address : Nævnenes hus, Toldboden 2

Town : Viborg

Postcode : 8800

Country subdivision (NUTS) : Vestjylland ( DK041 )

Country : Denmark

Email : klfu@naeveneshus.dk

Telephone : +45 72405600

Internet address : http://www.klfu.dk

Roles of this organisation :

Review organisation

Mediation organisation

8.1.

ORG-0003

Official name : Konkurrence- og Forbrugerstyrelsen

Registration number : 10294819

Postal address : Carl Jacobsens Vej 35

Town : Valby

Postcode : 2500

Country subdivision (NUTS) : Byen København ( DK011 )

Country : Denmark

Email : kfst@kfst.dk

Telephone : +45 41715000

Internet address : http://www.kfst.dk

Roles of this organisation :

Organisation providing more information on the review procedures

8.1.

ORG-0004

Official name : Mercell Holding ASA

Registration number : 980921565

Postal address : Askekroken 11

Town : Oslo

Postcode : 0277

Country subdivision (NUTS) : Oslo ( NO081 )

Country : Norway

Contact point : eSender

Email : publication@mercell.com

Telephone : +47 21018800

Fax : +47 21018801

Internet address : http://mercell.com/

Roles of this organisation :

TED eSender

Notice identifier/version : 7477941f-6dcc-4bee-9a60-cd9d11dc3f1b - 01

Form type : Result

Notice type : Contract or concession award notice – standard regime

Notice subtype : 29

Notice dispatch date : 18/08/2025 12:50:17 (UTC) Western European Time, GMT

Notice dispatch date (eSender) : 18/08/2025 12:50:54 (UTC) Western European Time, GMT

Languages in which this notice is officially available : English

Notice publication number : 542204-2025

OJ S issue number : 158/2025

Publication date : 20/08/2025

Fakta om udbudet

Silicon deep reactive ion etcher (Si DRIE)

Danmarks Tekniske Universitet - DTU