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  1. Udbud
  2. Laboratorieudstyr, optisk- og præcisionsudstyr
  3. Måleudstyr

Fakta om udbudet

EU-nr
2018/S 203-462280
Offentliggjort
20.10.2018
Udbudstype
Opdatering

Udbyder

Danmarks Tekniske Universitet - DTU

Multi-Chamber High Vacuum Sputtering Deposition System (1)

Danmarks Tekniske Universitet - DTU

Corrigendum

Notice for changes or additional information

Supplies

(Supplement to the Official Journal of the European Union, 2018/S 183-413683)

Legal Basis:

Directive 2014/24/EU

Section I: Contracting authority/entity

I.1) Name and addresses
Danmarks Tekniske Universitet - DTU
30060946
Anker Engelunds Vej 1
Kgs Lyngby
2800
Denmark
Contact person: Alexi Burns-Tang
Telephone: +45 45251126
E-mail: alexi@adm.dtu.dk
NUTS code: DK

Internet address(es):

Main address: http://www.dtu.dk

Address of the buyer profile: https://eu.eu-supply.com/ctm/Company/CompanyInformation/Index/165863

Section II: Object

II.1) Scope of the procurement
II.1.1) Title:

Multi-Chamber High Vacuum Sputtering Deposition System (1)

II.1.2) Main CPV code
38300000
II.1.3) Type of contract
Supplies
II.1.4) Short description:

This tender is concerning a multi-chamber high vacuum sputtering deposition system for R and D and pi-lot production applications with focus on high flexibility regarding source materials (metals, semiconductors, and dielectrics), substrate materials and substrate sizes. The system will be used for sputter deposition of various thin films onto standard sized si-wafers (mainly 100 mm and 150 mm) but it should also be possible to load smaller chips using carriers. It should be possible to deposit metal oxides, metal nitrides, and pure metal thin films and semiconductors in various sputtering modes (DC/RF/pulsed DC/HiPIMS/reactive sputtering).

Section VI: Complementary information

VI.5) Date of dispatch of this notice:
12/10/2018
VI.6) Original notice reference
Notice number in the OJ S: 2018/S 183-413683

Section VII: Changes

VII.1) Information to be changed or added
VII.1.2) Text to be corrected in the original notice
Section number: IV.2.2)
Place of text to be modified: Time limit for receipt of tenders or requests to participate
Instead of:
Date: 12/10/2018
Local time: 12:00
Read:
Date: 24/10/2018
Local time: 12:00
VII.2) Other additional information:

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