Maskless Aligner, MLA 150

Section I: Contracting authority/entity

I.1) Name and addresses

Official name: Danmarks Tekniske Universitet — DTU
National registration number: 30060946
Postal address: Anker Engelunds Vej 1
Town: Kgs. Lyngby
NUTS code: DK01
Postal code: 2800
Country: Denmark
Contact person: Katrine Freiesleben Petersen
E-mail: kafre@dtu.dk
Telephone: +45 93511749

Internet address(es):

Main address: http://www.dtu.dk

I.4) Type of the contracting authority

Body governed by public law

I.5) Main activity

Education

Section II: Object

II.1) Scope of the procurement

II.1.1) Title:

Maskless Aligner, MLA 150

II.1.2) Main CPV code

38000000

II.1.3) Type of contract

Supplies

II.1.4) Short description:

This regards a MLA 100 maskless aligner from Heidelberg Instruments Mikrotechnik GmbH, which is being used for photolithography. Traditionally, a pat-tern in micro and nanofabrication, has been produced by shining UV light through a chromium mask with a chromium pattern, thereby creating a ‘shado image’ on a silicon wafer with a thin pho-tosensitive film (photoresist). Contrary to this method, maskless aligners are writing the pattern directly on the wafer by means of a guided laser beam, thus eliminating the need for a shadow mask. This technique is especially advantageous in research and development projects, where frequent design changes often necessitate many new masks.

II.1.6) Information about lots

This contract is divided into lots: no

II.1.7) Total value of the procurement (excluding VAT)

Value excluding VAT: 344 000.00 EUR

II.2) Description

II.2.1) Title:

II.2.2) Additional CPV code(s)

38000000

II.2.3) Place of performance

NUTS code: DK01

Main site or place of performance:

2800, Kgs. Lyngby.

II.2.4) Description of the procurement:

This regards a MLA 100 maskless aligner from Heidelberg Instruments Mikrotechnik GmbH, which is being used for photolithography. Traditionally, a pat-tern in micro and nanofabrication, has been produced by shining UV light through a chromium mask with a chromium pattern, thereby creating a ‘shado image’ on a silicon wafer with a thin pho-tosensitive film (photoresist). Contrary to this method, maskless aligners are writing the pattern directly on the wafer by means of a guided laser beam, thus eliminating the need for a shadow mask. This technique is especially advantageous in research and development projects, where frequent design changes often necessitate many new masks.

II.2.5) Award criteria

II.2.11) Information about options

Options: no

II.2.13) Information about European Union funds

The procurement is related to a project and/or programme financed by European Union funds: no

II.2.14) Additional information

Section IV: Procedure

IV.1) Description

IV.1.1) Type of procedure

Negotiated procedure without prior publication

The works, supplies or services can be provided only by a particular economic operator for the following reason:
- absence of competition for technical reasons
Additional deliveries by the original supplier ordered under the strict conditions stated in the directive

Explanation:

Mutual backup: as previously mentioned, the maskless aligners have in very short time be-come central for many research and product development projects. Three machines with the same processes will act as each other’s mutual backup. If one machine doesn’t work, the 2 others can be used, so delays in important publications or the introduction of new products to the market can be avoided. Many start-up companies’ survival often depend on that their products are not delayed. Two different machines would not guarantee this to nearly the same extent.

Simplified quality control (QC): DTU Nanolab is ISO 9001:2008 certified and performs regu-lar quality control (QC) on the most used processes, where it is controlled that the processes lives up to some basic requirements for the performance. If a similar machine is purchased, a uniform quality can be achieved with much fewer resources, since the processes will be able to run completely in parallel on the 2 machines. It would imply far bigger costs to develop and maintain 2 different QC processes on 2 different machines.

Savings in process development: process recipes can be directly transferred between the 3 machines. This saves many valuable engineer hours that would be used to develop the same processes on a different type of machine.

Savings in training: each year DTU Naniolab’s cleanroom receives approximately 150 new users. Most of these need training in photolithography. An identical user interface will ensure that one can operate all 3 tools after just one training session. If a vastly different machine was installed, the already large time used on training would be doubled.

It's DTU's assessment that Heidelberg Instruments Mikrotechnik GmbH is the only manufacturer offering this product.

IV.1.3) Information about framework agreement

IV.1.8) Information about the Government Procurement Agreement (GPA)

The procurement is covered by the Government Procurement Agreement: yes

IV.2) Administrative information

IV.2.1) Previous publication concerning this procedure

Section V: Award of contract/concession

V.2) Award of contract/concession

V.2.1) Date of contract award decision:

18/11/2019

V.2.2) Information about tenders

The contract has been awarded to a group of economic operators: no

V.2.3) Name and address of the contractor/concessionaire

Official name: Heidelberg Instruments Mikrotechnik GmbH
Postal address: Tullastrasse 2
Town: Heidelberg
NUTS code: DE
Postal code: 69126
Country: Germany
Telephone: +49 6221343024

The contractor/concessionaire will be an SME: no

V.2.4) Information on value of the contract/lot/concession (excluding VAT)

Total value of the contract/lot/concession: 344 000.00 EUR

V.2.5) Information about subcontracting

Section VI: Complementary information

VI.3) Additional information:

VI.4) Procedures for review

VI.4.1) Review body

Official name: Klagenævnet for Udbud
Postal address: Nævnenes hus, Toldboden 2
Town: Viborg
Postal code: 8800
Country: Denmark
E-mail: klfu@erst.dk
Telephone: +45 35291000

Internet address: http://www.klfu.dk

VI.4.2) Body responsible for mediation procedures

VI.4.3) Review procedure

Precise information on deadline(s) for review procedures:

Complaint regarding the contracting authority’s award of contract without prior publication of a contract notice in the European Union Official Journal must be submitted no later than 30 calendar days from the date after a contract award notice has been published by the contracting authority in the European Union Official Journal and that contract award notice includes the grounds for the decision to award the contract directly, cf. lov om Klagenævnet for Udbud § 7, Section 3.

VI.4.4) Service from which information about the review procedure may be obtained

Official name: Konkurrence- og Forbrugerstyrelsen
Postal address: Carl Jacobsens Vej 35
Town: Valby
Postal code: 2500
Country: Denmark
E-mail: kfst@kfst.dk
Telephone: +45 41715000

Internet address: http://www.kfst.dk

VI.5) Date of dispatch of this notice:

18/11/2019

Fakta om udbudet

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Maskless Aligner, MLA 150

Danmarks Tekniske Universitet — DTU