Official name: Danmarks Tekniske Universitet — DTU
National registration number: 30060946
Postal address: Anker Engelunds Vej 1
Town: Kgs. Lyngby
NUTS code: DK01 Hovedstaden
Postal code: 2800
Country: Denmark
Contact person: Christian Torrendrup
E-mail: cvto@dtu.dk
Telephone: +45 23100296
Internet address(es):
Main address: http://www.dtu.dk

Body governed by public law

Education

Gemini SEM 500

Reference number: 6205

38511100 Scanning electron microscopes

Supplies

At DTU Nanolab’s cleanroom, we have a need to upgrade our SEM capability with a high-end instrument. The instrument will be a central tool for our nanostructure qualification which is described in the detailed explanation/justification below.

This contract is divided into lots: no

Value excluding VAT: 2 650 000.00 DKK

38511100 Scanning electron microscopes

NUTS code: DK01 Hovedstaden

Main site or place of performance:

Kgs. Lyngby (DTU Campus).

At DTU Nanolab, we have a current need to upgrade our SEM capability with a high-end instrument. A Schottky field emission (thermionic) source offering high emission at low energy spread will be necessary for providing a state of the art resolution of 0.5 nm or better at 15 kV (no immersion applied) and 1.0 nm or better at 0.5 kV (no beam deceleration or sample bias applied) using an in-lens detector. The instrument will need a beam-booster as it guarantees optimum beam conditions particularly at low acceleration voltages — a critically important mode of operation for a vast number of applications in our lab. Likewise, to ensure a high sample throughput and ideal imaging conditions free of hydrocarbon contamination, the chamber must be equipped with a fully integrated airlock system and a chamber-mounted plasma cleaner.

It is our intention that the SEM cover the most challenging applications in our lab. Consequently, it should be highly versatile and host a broad selection of advanced electron detectors in addition to the standard Everhart-Thornley secondary electron (SE) detector for high vacuum conditions.

Firstly, to qualify subtle material contrast differences in III-V materials, we need in-column energy selective detection of backscatter electrons (BSE's). Working in parallel, a separate annular in-lens detector will detect the in-column secondary electrons.

Secondly, to provide an alternative path for differentiating the same minuscule material variations, the chamber-mounted and pneumatically retractable BSE detector should have segmented annular diode detectors each of which should have individual amplification to allow angular selection of BSE's.

Thirdly, we are facing an increasing number of applications relying on the precise manufacturing of ultra-thin membranes. In this regard, we could dramatically improve our characterisation capability with an annular STEM detector for high-resolution transmission measurements.

Finally, we have a strong need to upgrade our ability to characterize nano-structures defined by electron beam lithography. The world-class performance of our Jeol JBX-9500FSZ E-Beam writer is simply not matched by our current SEM characterisation capability. The situation is especially challenging for line edge roughness measurements of sub 20 nanometre E-beam resist structures de-posited onto non-conducting substrates. Here, the need for charge compensation with its detrimental effects on the electron beam quality conflicts with the demand for extremely high image resolution. Clearly, we do not want to apply any kind of sample coating in order to reduce sample charging and thus suppress the high pressure requirement.

The acquisition concerns a fully refurbished Carl Zeiss GeminiSEM 500 consisting of:

• Basic Unit GeminiSEM 500 with airlock;

• 20nA High resolution configuration for CC/VP systems;

• NanoVP variable pressure imaging option;

• Plasma Cleaner with integrated software control in SmartSEM;

• 5-axes stepper stage with Tandem decel sample bias;

• Navigation with KLA and Lasertec files for defect detection.

The system is fitted with the following electron detectors:

• Everhart-Thornley SE detector;

• Annular Inlens SE detector;

• Inlens energy selective backscatter (EsB) detector;

• Pneumatically retractable 4 quadrant solid state BSE detector;

• Dedicated BSE detector for NanoVP;

• Annular STEM detector.

Options: no

The procurement is related to a project and/or programme financed by European Union funds: no

Negotiated procedure without prior publication

Explanation:

The NanoVP option of the Carl Zeiss GeminiSEM 500 is uniquely suited in this respect. This option provides a solution combining the high resolution of the in-column detection capabilities of both SE’s and BSE’s with high pressure conditions at the sample. To our knowledge, this option is a unique solution to this particular problem: The SEM must provide inlens detection of SE’s to ensure the required image resolution on insulating samples that demand pressures up 150 Pa in order to suppress charging effects.

Another very important feature is the possibility for navigation with KLA and Lasertec files which provides means for efficient defect review in combination with our KLA Tencor profilometer in the cleanroom.

A Carl Zeiss GeminiSEM 500 instrument with the above-mentioned configuration and functionalities uniquely meets all the present demands listed above and therefore, Carl Zeiss is the only supplier able to fulfil DTU’s needs as listed.

Such instrument can be delivered already within one month and within our budget (DKK 2 650 000 000).

The procurement is covered by the Government Procurement Agreement: yes

28/04/2021

The contract has been awarded to a group of economic operators: no

Official name: Carl Zeiss A/S
Postal address: Bregnerødvej 133
Town: Birkerød
NUTS code: DK01 Hovedstaden
Postal code: 3460
Country: Denmark

The contractor/concessionaire will be an SME: no

Total value of the contract/lot/concession: 2 650 000.00 DKK

Official name: Klagenævnet for Udbud
Postal address: Nævnenes hus, Toldboden 2
Town: Viborg
Postal code: 8800
Country: Denmark
E-mail: klfu@erst.dk
Telephone: +45 35291000
Internet address: http://www.klfu.dk

Precise information on deadline(s) for review procedures:

Complaint that the contracting authority, contrary to the Public Procurement Act, has concluded a contract without prior publication of a contract notice in the European Union Official Journal must be submitted no later than 30 calendar days from the date after a contract award notice has been published by the Contracting Authority in the European Union Official Journal and that contract award notice includes the grounds for the decision to award the contract directly, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, section 3.

Official name: Konkurrence- og Forbrugerstyrelsen
Postal address: Carl Jacobsens Vej 35
Town: Valby
Postal code: 2500
Country: Denmark
E-mail: kfst@kfst.dk
Telephone: +45 41715000
Internet address: http://www.kfst.dk

29/04/2021