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Glovebox-integrated sputter chamber for phosphosulfides
(11.05.2022)
Kurt J. Lesker
Austin House
Glovebox-integrated sputter chamber for phosphosulfides
Danmarks Tekniske Universitet - DTU
Bekendtgørelse med henblik på frivillig forudgående gennemsigtighed
Varer
Del I: Ordregivende myndighed/enhed
CVR-nummer: 30060946
Postadresse: Anker Engelunds Vej 1
By: Kgs. Lyngby
NUTS-kode: DK01 Hovedstaden
Postnummer: 2800
Land: Danmark
Kontaktperson: David Fajnzylber
E-mail: dafaj@dtu.dk
Internetadresse(r):
Overordnet internetadresse: http://www.dtu.dk
Del II: Genstand
Glovebox-integrated sputter chamber for phosphosulfides
A glovebox-integrated vacuum chamber for reactive sputter deposition and evaporation of thin film materials containing phosphorus, sulfur, nitrogen, and one or more metals. The system should al-low for: (i) loading/unloading of the substrates with deposited films, as well as of the sputter tar-gets, in an inert atmosphere, (ii) safe usage of the toxic/corrosive H2S, PH3, and NH3 gases within the chamber, (iii) integration with a sulfur cracking source, (iv) deposition temperatures between -100 °C and +500°C, and (v) simple mounting of sputter targets without screws.
The first element of the acquisition is a glovebox, i.e., a fully encapsulated work bench in a nitro-gen atmosphere that is almost free of oxygen and water (less than 0.1 ppm each). Materials inside the glovebox are handled through gloves placed on the front panel of the glovebox.
The second element of the acquisition is a vacuum chamber for reactive sputter deposition and evaporation of thin film materials simultaneously containing phosphorus, sulfur, nitrogen, and one or more metals. The supplier of the chamber should have previous documented experience in the design and delivery of glovebox-integrated sputter systems.
Loading/unloading of substrates with deposited films, sputter targets, and evaporation materials should be performed in an inert atmosphere using the gloves. Replacement of sputter targets in the chamber should be made possible without having to screw/unscrew any parts, for example by magnetically held magnetron sources. The chamber should have three sputter sources and one thermal evaporation source. The chamber should have access to the following gases: pure Ar, pure N2, 20% O2 in Ar, 10% PH3 in Ar, 10% H2S in Ar, 10% NH3 in Ar. It should be made possible to pump and purge the chamber with ambient air to prevent the accumulation of air-sensitive coatings inside the chamber. This should be done without compromising the purity of the glovebox atmos-phere.
The chamber design should address the toxicity and corrosion properties of H2S, PH3, and NH3. In particular, the components of the system should be checked (and replaced as needed) to ensure compatibility with these gases. Appropriate interlocks and ventilated gas boxes are required. The supplier should also have previous documented experience in the design and delivery of vacuum systems with access to H2S, PH3, and NH3, specifically addressing the safety handling of highly toxic gasses such as PH3.
The chamber design should make it possible to integrate a sulfur cracking source from an external supplier. Specifically, it should be possible to adjust the horizontal and vertical position of the cracking source to obtain different cracker-substrate distances and to have the cracker point at dif-ferent parts of the substrate. The supplier should have previous documented experience in integrat-ing cracking sources from other suppliers into their own chambers.
The temperature of the substrate holder in the chamber should be adjustable between -100 °C and +500°C during deposition. It should be made possible to apply rotation and a radio-frequency bias to the substrate during processing.
The contract contains options on service agreement, spare parts and system customizations.
Del IV: Procedure
- Kun en bestemt økonomisk aktør kan levere de pågældende bygge- og anlægsarbejder, varer eller tjenesteydelser af følgende årsag:
- manglende konkurrence af tekniske årsager
The present acquisition consists of a highly customized film deposition tool that cannot be ordered from a catalog and requires a high degree of customization. This already rules out many companies that only offer standard products.
We have contacted several reputable suppliers or custom vacuum deposition setups and found that only Kurt J. Lesker Company could deliver all specifications.
Other companies either do not provide deposition systems that are directly accessible through a glovebox or don’t have previous experience with PH3 and H2S gases or integration of a cracking source. It is also our experience that companies are often only willing to offer general-purpose corrosion-resistant components, instead of gas-specific components.
Andrea Crovetto has recently been awarded an ERC Starting Grant with start date 1 August 2022 and access to additional funding for the purchase of this specific piece of equipment. Since the current delivery time for this system is estimated as 10 months, this system should be ordered as soon as possible. Another reason why time is an issue is that the ERC Starting Grant does not pre-finance the system but will only pay for its depreciation during the time of the project (5 years) and will only start to do so once the system has been delivered.
Del V: Kontrakt-/koncessionstildeling
Glovebox-integrated sputter chamber for phosphosulfides
By: Austin House
NUTS-kode: UK United Kingdom
Land: Det Forenede Kongerige
Del VI: Supplerende oplysninger
Postadresse: Nævnenes hus, Toldboden 2
By: Viborg
Postnummer: 8800
Land: Danmark
E-mail: klfu@erst.dk
Telefon: +45 35291000
Internetadresse: http://www.klfu.dk
Complaint regarding prequalification:
Complaint regarding prequalification must be submitted no later than 20 calendar days after notification has been sent to the concerned Candidates informing them who has been selected, if the notification includes the grounds for the decision, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 1.
Complaint regarding award of contract:
Complaint regarding the award of a contract must be submitted no later than 45 calendar days from the date after the Contracting Authority has published a notice in the European Union Official Journal informing that the Contracting Authority has awarded/concluded a contract, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, no. 1.
Complaint regarding award of a contract under a framework agreement with a reopening of the competition (mini-tender):
Complaint regarding the award of a contract under a framework agreement with a reopening of the competition must be submitted no later than 30 calendar days from the date after the Contracting Authority has notified the concerned Tenderers that a contract based on a framework agreement with a reopening of the competition has been awarded/concluded, if the notification includes the grounds for the decision, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, no. 2.
Complaint regarding the award of a framework agreement:
Complaint regarding the award of a contract must be submitted no later than 6 months from the date after the Contracting Authority has notified the concerned Candidates and Tenderers that a framework agreement has been concluded, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, no. 3.
Complaint regarding direct award of contract:
Complaint that the Contracting Authority, contrary to the Public Procurement Act, has concluded a contract without prior publication of a contract notice in the European Union Official Journal must be submitted no later than 30 calendar days from the date after a contract award notice has been published by the Contracting Authority in the European Union Official Journal and that contract award notice includes the grounds for the decision to award the contract directly, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, section 3.
Compliant regarding public procurements below the EU threshold:
Complaint regarding violation of public procurements below the EU threshold must be submitted no later than 45 calendar days from the date after the Contracting Authority has notified the Tenderers about the award of contract, if this notification includes the grounds for the decision; and no later than 6 months from the date after the Contracting Authority has notified the concerned Candidates and Tenderers that a framework agreement has been concluded, if the notification includes the grounds for the decision, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, section 4, no. 1 and 2. Compliant regarding prequalification on procurement below the EU threshold must be submitted no later than 20 calendar days from the date after the Contracting Authority has sent a notification to the concerned Candidates who has been selected and this notification includes the grounds for the decision, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders)) § 7, Section 5.
Postadresse: Carl Jacobsens Vej 35
By: Valby
Postnummer: 2500
Land: Danmark
E-mail: kfst@kfst.dk
Telefon: +45 41715000
Internetadresse: http://www.kfst.dk