Fakta om udbudet
Offentliggjort
12.07.2024
Udbudstype
Andre
Udbyder
Danmarks Tekniske Universitet - DTU
9219 - Purchase of bench-top maskless aligner with two different UV exposure wavelengths
Danmarks Tekniske Universitet - DTU
| Opgavebeskrivelse | DTU is planning to purchase a maskless UV aligner from Heidelberg Instruments Mikrotechnik GmbH, which fulfills the following specifications: - Maskless UV aligner enabling UV exposure of photoresist on carrier substrates with a maximum size of 150 mm x 150 mm - Raster scan mode exposure at high speed with a wavelength of 365 nm relevant for thick film photoresists such as SU-8 with a resolution down to 1 µm - Vector mode exposure with a wavelength of 405 nm with a resolution down to 1 µm - Bench-top equipment, with footprint area below 1 m2 - x-y alignment to pre-existing structures with a precision of 1 µm - Pneumatic autofocus enabling exposure of photoresists deposited on transparent substrates Reasons for the Direct Award: The µMLA system from Heidelberg Instruments is a unique system that allows the illumination of photo resins on objects with a size of up to 150 mm x 150 mm with a resolution down to 1 µm. The unique thing about µMLA described here is that we get it delivered with 2 different UV wavelengths, 365 nm and 405 nm. It enables illumination of multi-material stacks with high precision and without the need for alignment when changing wavelength. We have been looking for such a system for several years and this is the first time we have identified any equipment that can meet our requirements while the machine is a bench-top system. As a special function, the system has the option of using pneumatic auto-focus, unlike optical auto-focus, it enables the illumination of resins deposited on transparent materials (glass/polymers). |
| Annonceret | 12. juli 2024 19:00:00 CEST |
| Deadline | 22. juli 2024 12:00:00 CEST |
| Udbudstype | Mindre danske udbud |
| Opgavetype | Varekøb |
| Udbudsform | Andet |
| CPV kode | 38000000 |
| Myndighedstype | Andet |
| Skønnet kontraktsum | 1 020 600,00 |
Dokumenter & materiale
| Link til udbudsmateriale | http://eu.eu-supply.com/ctm/Supplier/PublicPurchase/408860 |
Tildelings- og udvælgelseskriterier
| Tildelingskriterier | Laveste pris |
| Udvælgelseskriterier |
Kontaktperson
| Navn | Pia Blume |
| Telefon | +45 93511388 |
| piabl@dtu.dk |
Ordregiver
| Navn | Danmarks Tekniske Universitet - DTU |
| Adresse | Anker Engelunds Vej 1 2800 Kgs. Lyngby DK |
| Telefon | +45 45252525 |
| dtu@dk.dk | |
| WWW | http://www.dtu.dk |