Fakta om udbudet

EU-nr

2018/S 183-413683

Offentliggjort

22.09.2018

Udbudstype

Offentligt udbud

Bestilling af materiale

http://eu.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=220404&B=DTU

Udbyder

Danmarks Tekniske Universitet - DTU

Opdateringer

Rettelse

(20.10.2018)

Link til rettelse

IV.2.2)
Placing the text to be modified:Time limit for receipt of tenders or requests to participate
instead of:
Date: 12-10-2018
Time: 12:00
Read:
Date: 24-10-2018
Time: 12:00

Multi-chamber High Vacuum Sputtering Deposition System (1)

Danmarks Tekniske Universitet - DTU

Contract notice

Supplies

Legal Basis:

Directive 2014/24/EU

Section I: Contracting authority

I.1) Name and addresses

Danmarks Tekniske Universitet - DTU
30060946
Anker Engelunds Vej 1
Kgs. Lyngby
2800
Denmark
Contact person: Alexi Burns-Tang
Telephone: +45 45251126
E-mail: alexi@adm.dtu.dk
NUTS code: DK

Internet address(es):

Main address: http://www.dtu.dk

Address of the buyer profile: https://eu.eu-supply.com/ctm/Company/CompanyInformation/Index/165863

I.2) Information about joint procurement

I.3) Communication

The procurement documents are available for unrestricted and full direct access, free of charge, at: http://eu.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=220404&B=DTU

Additional information can be obtained from the abovementioned address

Tenders or requests to participate must be submitted electronically via: http://eu.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=220404&B=DTU

Tenders or requests to participate must be submitted to the abovementioned address

I.4) Type of the contracting authority

Body governed by public law

I.5) Main activity

Education

Section II: Object

II.1) Scope of the procurement

II.1.1) Title:

Multi-chamber High Vacuum Sputtering Deposition System (1)

II.1.2) Main CPV code

38300000

II.1.3) Type of contract

Supplies

II.1.4) Short description:

This tender is concerning a multi-chamber high vacuum sputtering deposition system for R&D and pi-lot production applications with focus on high flexibility regarding source materials (metals, semicon-ductors, and dielectrics), substrate materials and substrate sizes. The system will be used for sputter deposition of various thin films onto standard sized Si-wafers (mainly 100 mm and 150 mm) but it should also be possible to load smaller chips using carriers. It should be possible to deposit metal oxides, metal nitrides, and pure metal thin films and semiconductors in various sputtering modes (DC/RF/pulsed DC/HiPIMS/reactive sputtering).

II.1.5) Estimated total value

II.1.6) Information about lots

This contract is divided into lots: no

II.2) Description

II.2.1) Title:

II.2.2) Additional CPV code(s)

38000000

II.2.3) Place of performance

NUTS code: DK

II.2.4) Description of the procurement:

II.2.5) Award criteria

Criteria below

Quality criterion - Name: Quality and functionality / Weighting: 55 %

Quality criterion - Name: Service / Weighting: 15 %

Price - Weighting: 30 %

II.2.6) Estimated value

II.2.7) Duration of the contract, framework agreement or dynamic purchasing system

Duration in months: 24

This contract is subject to renewal: no

II.2.10) Information about variants

Variants will be accepted: no

II.2.11) Information about options

Options: yes

Description of options:

Section ID description weight — Quality points

A5.17 A-Gen 17 In-situ quartz crystal microbalance thickness measurement. Describe solution.

2,75

B5.19 B-Gen 19 In-situ quartz crystal microbalance thickness measurement. Describe solution.

2,75

Will be evaluated on price alone:

A2.9 A-Vac 9 Chamber bake out: System for chamber bake out during pump down (110 C). Describe solution.

B2.9 B-Vac 9 Chamber bake out: System for chamber bake out during pump down (110 C). Describe solution.

E1.7 4 year service contract 4 year service contract including description of main items to be serviced/replaced and labor time

II.2.12) Information about electronic catalogues

II.2.13) Information about European Union funds

The procurement is related to a project and/or programme financed by European Union funds: no

II.2.14) Additional information

Section III: Legal, economic, financial and technical information

III.1) Conditions for participation

III.1.1) Suitability to pursue the professional activity, including requirements relating to enrolment on professional or trade registers

List and brief description of conditions:

Tenderer holds an official quality management certificate (ISO 9001-2015 or similar). Provide a copy of the certificate (ISO 9001-2015 or similar)

III.1.2) Economic and financial standing

List and brief description of selection criteria:

The tenderer must state the general yearly turnover and the specific yearly turnover in the business area covered by the contract for the last 3 audited financial years, and the minimum level for suit-ability is 2 x the contract value calculated as an average of the turnover in the last 3 financial years.

The tenderers must state the profit margin for the last 3 audited financial years, and the Solvency ratio for the last audited financial year.

If the Tenderer can’t state the required figures for economic and financial standing, the Tenderer can document their economic and financial standing by sending an On-demand guarantee with a value of DKK 2 x the contract value.

Minimum level(s) of standards possibly required:

Turnover: the minimum level for suitability is 2 x the contract value calculated as an average of the turnover in the last 3 financial years.

All key figures must be at least 0.

III.1.3) Technical and professional ability

List and brief description of selection criteria:

The Tenderer must give references for comparable contracts. The minimum level for suitability is 3 customer references for each of the 3 requirements below, from contracts that have been fulfilled on time including passing of acceptance tests and references cannot be more than 5 years old.

— documented experience in making cluster-based multi-chamber high vacuum physical vapor deposition systems with a fully automated robotic substrate transfer though central distribution vacuum chamber,

— documented experience in making pulsed DC sputtering,

— documented experience in making High-power impulse magnetron sputtering (HiPIMS).

Minimum level(s) of standards possibly required:

The minimum level for suitability is 3 customer references for each of the 3 requirements stated above.

III.1.5) Information about reserved contracts

III.2) Conditions related to the contract

III.2.2) Contract performance conditions:

III.2.3) Information about staff responsible for the performance of the contract

Section IV: Procedure

IV.1) Description

IV.1.1) Type of procedure

Open procedure

IV.1.3) Information about a framework agreement or a dynamic purchasing system

IV.1.4) Information about reduction of the number of solutions or tenders during negotiation or dialogue

IV.1.6) Information about electronic auction

IV.1.8) Information about the Government Procurement Agreement (GPA)

The procurement is covered by the Government Procurement Agreement: yes

IV.2) Administrative information

IV.2.1) Previous publication concerning this procedure

IV.2.2) Time limit for receipt of tenders or requests to participate

Date: 12/10/2018

Local time: 12:00

IV.2.3) Estimated date of dispatch of invitations to tender or to participate to selected candidates

IV.2.4) Languages in which tenders or requests to participate may be submitted:

Danish, English

IV.2.6) Minimum time frame during which the tenderer must maintain the tender

Tender must be valid until: 19/04/2019

IV.2.7) Conditions for opening of tenders

Date: 19/10/2018

Local time: 12:00

Section VI: Complementary information

VI.1) Information about recurrence

This is a recurrent procurement: no

VI.2) Information about electronic workflows

Electronic ordering will be used

Electronic invoicing will be accepted

Electronic payment will be used

VI.3) Additional information:

VI.4) Procedures for review

VI.4.1) Review body

Klagenævnet for Udbud
Nævnenes hus, Toldboden 2
Viborg
8800
Denmark
Telephone: +45 35291000
E-mail: klfu@erst.dk

Internet address: http://www.klfu.dk

VI.4.2) Body responsible for mediation procedures

VI.4.3) Review procedure

Precise information on deadline(s) for review procedures:

Complaint regarding a decision on shortlisting:

Complaint regarding a decision on shortlisting must be submitted no later than 20 calendar days from the date after notification to the concerned candidates informing them of who has been selected has been sent and this notification includes the grounds for the decision, cf. law regarding, Complaints board (in danish Klagenævnet for Udbud) § 7, section 1.

Complaint regarding the award of contract:

Complaint regarding the award of contract must be submitted no later than 45 calendar days from the date after the Contracting Authority has published a contract award notice in the European Union Official Journal informing that the Contracting Authority has awarded the contract, cf. Law regarding Complaints board (in danish Klagenævnet for Udbud) § 7, section 2, No. 1.

Complaint regarding the award of a contract under a Framework Agreement with a reopening of the competition:

Complaint regarding the award of a contract under a Framework Agreement with a reopening of the competition must be submitted no later than 30 calendar days form the date after the Contracting Authority has notified the concerned tenderers that a contract has been awarded, if the notification includes the grounds for the decision, cf. Law regarding Complaints board (in danish Klagenævnet for Udbud) § 7, section 2, No. 2.

Complaint regarding the award of a Framework Agreement:

Complaint regarding the award of a Framework Agreement must be submitted no later than 6 months from the date after the Contracting Authority have notified the concerned candidates and tenderers that award of contract has happened, cf. Law regarding the Complaints board (in Danish Klagenævnet for Udbud) § 7, section 2, No. 3.

Complaint regarding direct award of contract:

Complaint regarding the Contracting Authority’s award of contract without prior publication of a contract notice in the European Union Official Journal must be submitted no later than 30 calendar days from the date after a contract award notice has been published by the Contracting Authority in the European Union Official Journal and that contract award notice includes the grounds for the decision to award the contract directly, cf. Law regarding Complaints board (in danish Klagenævnet for Udbud) § 7, section 3.

Compliant regarding public procurements below the EU threshold:

Complaint regarding public procurements below the EU threshold must be submitted no later than 45 calendar days from the date after the Contracting Authority has notified the tenderers about the award of contract if this notification includes the grounds for the decision; and no later than 6 months after the date where the Contracting Authority has notified the candidates and tenderers about that award of a Framework Agreement, if the notification includes the grounds for the decision, cf. Law regarding Complaints board (in danish Klagenævnet for Udbud) § 7, section 4, No. 1 and 2. Compliant regarding a decision on shortlisting on procurement below the EU threshold must be submitted no later than 20 calendar days from the date after the Contracting Authority has sent a notification to the concerned candidates regarding who has been selected and this notification includes the grounds for the decision, cf. Law regarding Complaints board (in danish Klagenævnet for Udbud) § 7, section 5.

VI.4.4) Service from which information about the review procedure may be obtained

Konkurrence- og Forbrugerstyrelsen
Carl Jacobsens Vej 35
Valby
2500
Denmark
Telephone: +45 41715000
E-mail: kfst@kfst.dk

Internet address: http://www.kfst.dk

VI.5) Date of dispatch of this notice:

19/09/2018

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Fakta om udbudet

Opdateringer

Multi-chamber High Vacuum Sputtering Deposition System (1)

Danmarks Tekniske Universitet - DTU

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